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由于CEMS中需要控制的是按一定時間序列開閉的管路，故PLC程序主要用于接收各種操作命令，控制各種閥、泵、指示燈的開閉及互鎖，并定時或實時完成對采樣通道的吹掃、測量儀器的標定。并對采集到的各模擬量進行數字濾波。
　　?　　上位機程序
　　　　主要用于顯示各個分析設備的工作情況，匯總煙氣的歷史數據，進行打印歸檔、趨勢顯示及報警信息處理。
　　　　上位機通過FameView組態軟件與AC500 PLC通過MODBUS-RTU或MODBUS-TCPIP協議進行通訊。實時的從儀器上采集數據，將采集到的數據分析處理后保存到數據庫中，并實現實時數據和歷史數據查看和曲線查詢，對數據庫中的數據進行查詢、報表打印或導出到 EXCEL 表格中。ies K37 AQH100/3/4 Helical-Bevel Gear Reducer
New Applied Materials 3690-01884 SCR CAP SKT HD 10-24 X 5/8 HEX SKT SST

New Applied Materials 3700-01288 VCR Gasket

New Applied Materials 3880-01161 Flat Washer

New Applied Materials 3690-01879 SCR, CAP SKT HD 10-24 x 3/4 L HEX SKT SS

New Applied Materials 3880-01129 Locking Washer Split 1/4.487 ODX

New Applied Materials 3690-01922 SCR CAP HD 6/32 X 1/2L HEX SKT SST

New Applied Materials 0910-01073 Fuse Holder Body High Current Shock Proof

New Applied Materials 3690-02223 SCR CAP SKT HD 6/32 x 5/8

New Applied Materials 0270-20037 Tool Indexer Calibration Bar A

New Applied Materials 3690-03129 SCR CAPTIVE PNL 6-32 x 2.18 THDX

Applied Materials 3080-01054 Timing Belt 3MMP 6MMW

New Applied Materials 3300-02269 FTG TBG CAP 1/4VCR FEM HEX

Applied Materials 0020-76474 Brkt Gen Rack Connector Plate

Applied Materials 3300-01348 Bellow Block Plate FTG Flange Blank Off NW50 SST

New Applied Materials 3700-01087 Centering Ring Assy NW40 With Viton O-Ring Seal

AMAT FITTING MALE PIPE HOSE 1/4 MPTX 3300-02501

New Applied Materials 0020-22906 Pin Pedestal

New Applied Materials 0020-38753 Lift Pin Kit Conductive SIMP Cathode

Applied Materials 3300-02700 Barbed hose Fitting 1/2H x 3/4-16SAE 37deg S

Applied Materials 3700-01087 Seal Center Ring Assembly NW40 w/Viton O-Ring SST

Applied Materials 3700-01088 Seal Center Ring Assembly NW50 with Viton O-Ring

New Applied Materials 3300-0134 FTG Flange Blank-off NW40 2.16OD x .20THK SST304

New Applied Materials 3300-02640 FTG TBG NUT FEM 1/4VCR FEMALE CAP

Applied Materials 0020-22770 Braket 2/L SST Panel

Applied Materials 3300-03902 Hose Fitting 1" 1-5/16"

Applied Materials 0150-20578 CBL Ebara Emo Jumper Plug A Series

New Applied Materials 0020-38700 Clamp Bulkhead

New Applied Materials 0020-01277 Cable Convection Kit 76" DB15P-CG5

New Applied Materials 3690-01953 SCR CAP SKT HD 3/16-18 x 25

New Applied Materials 0021-23214 Lift Pin Adjust

New Applied Materials 0021-23213 Lift Pin Fast Lift 200MM EMAX

Applied Materials 0021-09453 Poly Throttle Valve Cleaning Tool

New Applied Materials 0040-05997 Shroud, Lexan Slit Liner Door

Applied Materials 3870-01256 Throttle Valve Housing

Applied Materials 0020-33815 Blank Off Plate DPS Metal / DPS Poly

New Applied Materials 0020-33803 Pad Foot Upper Chamber DPS

TEL TS3210-201270-1?1 Furnace ATMO Tube Holder

Applied Materials 0020-33805 Gas Feed Adapter Cover DPS Metal

Applied Materials 0150-76156 Cable Assy Insertion Flow Sensor Common Mainframe

New Applied Materials 0021-10566 Conductive Lift Pin .090 Simple Cath

New Applied Materials 0021-03878 Flap, Anodized, Bottom, Throttle Valve

New Applied Materials 3300-02639 Fitting Tube GLND 3/8 Tube to 1/4 VCR GLND

Applied Materials 0200-35293 Window Manometer Port DPS Metal

New Applied Materials 0021-03877 Flat Anodized Top Throttle Valve

New Applied Materials 0200-10392 End Point Window for MXP Poly Etch

New Applied Materials 0021-09836 Aluminum Gasket

Applied Materials 3300-01348 FTG Flange Blank Off NW50 2.95OD

New Applied Materials 0021-03278 Block Spacer Cylinder Support

New Applied Materials 0040-39621 Cylinder Support Cover

New Applied Materials 0020-20558 Blank Slit Valve Contract

Applied Materials 0200-39296 DPS Poly RG Aperture

Applied Materials 0021-04316 Secondary Throttle Valve Flat Bottom

Applied Materials 0100-35267 PCB Gas Pallet Interlocks Matrix 5200 Etch

New Applied Materials 0150-20537 Cable Assembly Pump Control CH C/D

New Applied Materials 0150-20574 Cable Assembly A/B Pump Standard Interface

New Applied Materials 0040-77243 PPS Ring 8" SS

Applied Materials 0020-22852 Shield Preclean

Applied Materials 0200-10087 Outer Ceramic Ring 1.5 SSGD R2

Applied Materials 0020-31700 Shaft Removal Throttle